Nanostructure characterization of high k materials by spectroscopic ellipsometry

In this work, the optical and structural properties of high k materials such as tantalum oxide and titanium oxide were studied by spectroscopic ellipsometry, where a Tauc-Lorentz dispersion model based in one (amorphous films) or two oscillators (microcrystalline films) was used. The samples were deposited at room temperature by radio frequency magnetron sputtering and then annealed at temperatures from 100 to 500 °C. Concerning the tantalum oxide films, the increase of the annealing temperature, up to 500 °C does not change the amorphous nature of the films, increasing, however, their density. The same does not happen with the titanium oxide films that are microcrystalline, even when deposited at room temperature. Data concerning the use of a four-layer model based on one and two Tauc-Lorentz dispersions is also discussed, emphasizing its use for the detection of an amorphous incubation layer, normally present on microcrystalline films grown by sputtering.     

Structural and electrical properties of crystalline (1−x)Ta2O5−xTiO2 thin films fabricated by metalorganic decomposition

Polycrystalline (1−x)Ta₂O₅−xTiO₂ thin films were formed on Si by metalorganic decomposition (MOD) and annealed at various temperatures. As-deposited films were in the amorphous state and were completely transformed to crystalline after annealing above 600 °C. During crystallization, a thin interfacial SiO₂ layer was formed at the (1−x)Ta₂O₅−xTiO₂/Si interface. Thin films with 0.92Ta₂O₅–0.08TiO₂ composition exhibited superior insulating properties. The measured dielectric constant and dissipation factor at 1 MHz were 9 and 0.015, respectively, for films annealed at 900 °C. The interface trap density was 2.5×10¹¹ cm⁻² eV⁻¹, and flatband voltage was −0.38 V. A charge storage density of 22.8 fC/μm² was obtained at an applied electric field of 3 MV/cm. The leakage current density was lower than 4×10⁻⁹ A/cm² up to an applied electric field of 6 MV/cm.     

衬钽管石墨炉中小量氢气的影响及稀土基质激光晶体中铕的测定

通过纯氩中加入小量氢气,研究了保护气体对衬鉏管石墨炉分析性能的影响,结果表明,采用5％H_2-Ar作保护气体,可以显著提离衬鉏管的成品率,明显延长衬鉏管的使用寿命,使衬钽管的测定重现性得到改善,而对测定灵敏度没有明显影响。干扰试验表明,本方法可直接用于稀土基质激光晶体中铕的测定,分析结果与计算值基本一致。     

衬钽管石墨炉原子吸收法测定痕量镓时基体改进剂的研究及应用

提出用钒和铜混合基体改进剂衬钽管石墨炉原子吸收测定镓的方法。衬钽管使镓的灵敏度提高6倍左右,钒和铜混合基体改进剂不仅能进一步提高灵敏度,而且能提高灰化温度,降低原子化温度,增强抗干扰能力。测定 GSD 标准样品中的镓时,不需对样品进行预分离即可直接进行测定,结果与参考值相符。     

Tantalum Clusters in Oxidic Matrices — Synthesis,Crystal Structure and Magnetic Properties of Eu1.83Ta15O32

The mixed‐valent oxotantalate Eu_1.83Ta₁₅O₃₂ was prepared from a compressed mixture of Ta₂O₅ and the metals in a sealed Ta ampoule at 1400 °C. The crystal structure was determined by means of single crystal X‐ray diffraction: space group R3¯, a = 777.2(6) pm and c = 3523.5(3) pm, Z = 3, 984 symmetrically independent reflections, 83 variables, R_F = 0.027 for I > 2σ (I). The structure is isotypic to Ba₂Nb₁₅O₃₂. The salient feature is a [Ta(+8/3)₆O₁₂ⁱO₆^a] cluster consisting of an octahedral Ta₆ core bonded to 12 edge‐bridging inner and six outer oxygen atoms. The clusters are arranged to slabs which are sandwiched by layers of [Ta(+5)₃O₁₃] triple octahedra. Additional Ta(+5) and Eu(+2) atoms provide the cohesion of these structural units. Twelve‐fold coordinated Eu(+2) atoms are situated on a triply degenerate position 33 pm displaced from the threefold axis of symmetry. A depletion of the Eu(+2) site from 6 to 5.5 atoms per unit cell reduces the number of electrons available for Ta‐Ta bonding from 15 to 14.67 electrons per cluster. Between 125 and 320 K Eu_1.83Ta₁₅O₃₂ is semi‐conducting with a band gap of 0.23 eV. The course of the magnetization is consistently described with the Brillouin function in terms of a M_mol/(N_Aμ_B) versus B/T plot in the temperature range 5 K — 320 K and at magnetic flux densities 0.1 T — 5 T. At moderate flux densities (< 1 T) the magnetic moment agrees fairly well with the expected value of 7.94 μ_B for free Eu (2+) ions with 4f⁷ configuration in ⁸S_7/2 ground state. Below 5 K, anisotropic magnetization measurements at flux densities B < 1 T point to an onset of an antiferromagnetic ordering of Eu spins within the layers and an incipient ferromagnetic ordering perpendicular to the layers.     

XAS investigation of tantalum and niobium in nanostructured TiO2 anatase

Sol-gel routes were used to prepare Ta 10 at% and Nb 5 at% and 10 at% doped titania nanosized powders. When fired between 410°C and 850°C the doped titania powders are in the anatase phase; further heating up to 1050°C is required to obtain the rutile phase. The presence of dopant atoms delays the rate of transformation as compared with pure titania powders. Doping also affects the rate of grain growth and increases the conductance response to gas. To better understand the role played by dopant atoms in inhibiting both phase transformation to rutile and grain growth, X-ray Absorption Spectroscopy measurements were performed at the L_III-L_I absorption edges of Ta and Nb K absorption edge. Analysis was restricted to the anatase phase because the transformation to rutile phase, obtained by firing at 1050°C, is accompanied by the formation of undesired Ta and Nb oxides (Ta₂O₅ and Nb₂TiO₇, respectively). Extended X-ray Absorption Fine Structure and X-ray Absorption Near-Edge Spectroscopy analysis results indicate that in nanostructured anatase both tantalum and niobium atoms substitute Ti cations with +5 valence state.     

Complexes of tantalum with triaryloxides: Ligand and solvent effects on formation of hydride derivatives

A family of tantalum compounds supported by the triaryloxide [R-L]³⁻ ligands are reported [H₃(R-L) = 2,6-bis(4-methyl-6-R-salicyl)-4-tert-butylphenol, where R = Me or ^tBu]. The reaction of H₃[Me-L] with TaCl₅ in toluene gave [(Me-L)TaCl₂]₂ (1). The [^tBu-L] analogue [(^tBu-L)TaCl₂]₂ (2) was synthesized via treatment of TaCl₅ with Li₃[^tBu-L]. A THF solution of LiBHEt₃ was added to 1 in toluene to provide [(Me-L)TaCl(THF)]₂ (3), while treatment of 2 with 2 equiv of LiBHEt₃ or potassium in toluene followed by recrystallization from DME resulted in formation of [M(DME)₃][{(^tBu-L)TaCl}₂(μ-Cl)] [M = Li (4a), K (4b)]. When the amount of MBHEt₃ (M = Li, Na, K) was increased to 5 equiv, the analogous reactions in toluene afforded [{(bit-^tBu-L)Ta}₂(μ-H)₃M] [M = Li(THF)₂ (5a), Na(DME)₂ (5b), K(DME)₂ (5c)]. During the course of the reaction, the methylene CH activation of the ligand took place. Dissolution of 5a in DME produced [{(bit-^tBu-L)Ta}₂(μ-H)₃Li(DME)₂] (6), indicating that the coordinated THF molecules are labile. When the 2/LiBHEt₃ reaction was carried out in THF, the ring opening of THF occurred to yield [(^tBu-L)Ta(OBuⁿ)₂]₂ (7) along with a trace amount of [Li(THF)₄][{(^tBu-L)TaCl}₂(μ-OBuⁿ)] (8). Treatment of 2 with potassium hydride in DME yielded [{(^tBu-L)TaCl₂K(DME)₂}₂(μ-OCH₂CH₂O)] (9), in which the ethane-1,2-diolate ligand arose from partial C-O bond rupture of DME. The X-ray crystal structures of 2, 3, 4, 5a, 6, 7, and 9 are described.     

钽硫原子簇的形成及激光裂解的初步研究

报导用激光直接溅射的方法产生了大量的钽硫原子团簇离子Ta_nS_m~+(n≤9, m≤30),并用串级飞行时间质谱仪研究了所产生团簇离子的组成及紫外激光裂解规律。实验发现, 最稳定的团簇正离子往往具有Ta_nS_(2n+7)~+(n=1,2,…9)的组成, 相应的负离子具有, Ta_nS_(2n+3)~-(n=1,2,…9)的组成。各种团簇正离子的激光裂解的主要通道是连续的S_2消除过程, 且对于n=3,4,5的团簇, 主要光解产物还有Ta_3S_4~+或Ta_4S_6~+离子。据此推测出Ta_nS_m~+团簇离子的可能结构为在Ta原子周围有6个左右的S原子配位。Ta原子之间不存在直接的化学键,而较大团簇可能是以Ta_3S_4或Ta_4S_6为核心的结构。     

Magnetic Anisotropy of Dichlorobis(η5‐cyclopentadienyl) Complexes of Vanadium,Niobium, and Tantalum

Abstract. The magnetic behavior of the mononuclear nd¹ systems MCp₂Cl₂ (M = V⁴⁺[3d¹], Nb⁴⁺[4d¹], Ta⁴⁺[5d¹], space group P2₁/c, pseudosymmetry of the molecules C_2v) deviates from pure single ion spin magnetism on account of ligand field effect (H_lf), spin‐orbit coupling (H_so), and intermolecular spin‐spin exchange interactions (H_ex). For both VCp₂Cl₂ and NbCp₂Cl₂ excellent adaptations to the measured susceptibility data were obtained (2 K ≤ T ≤ 300 K) on the basis of spectroscopic data (lf, so) and cooperative metal–metal interactions (ex) of antiferromagnetic nature [molecular field model (mf)]. For TaCp₂Cl₂ experimental term structure data are not available. Therefore, Jørgensen's spectroscopical series (g‐factor of the central ion) was applied to extrapolate the data set for TaCp₂Cl₂. H_lf, H_so, and H_ex (antiferromagnetic) increase in the order 3d¹ → 4d¹ → 5d¹ leading, with rising atomic number of the metals, to a distinct enhancement of the magnetic anisotropy. At 4 K the μ_eff components μ_eff,y (oriented perpendicular to the cg–M–cg plane; “cg” = center of gravity of the Cp ring), μ_eff,z (oriented along the twofold pseudoaxis), and μ_eff,x are 1.73, 1.69, 1.68 (V), 1.73, 1.62, 1.59 (Nb), and 1.71, 1.59, 1.49 (Ta). While μ_eff,y is independent of T, both μ_eff,z and μ_eff,x decrease with decreasing T.     

Early/Late Heteronuclear Complexes Bridged by Bifunctional Phosphorus-Based Ligands

Substituted bifunctional phosphorus-based ligands HX(CRR') n PR"H (or -PR" 2 ) [where X = O, S, NR', (substituted) cyclopentadienyl; n = 1, 2, 3; R, R', R" = alkyl, aryl, H] were employed as bridging ligands in the synthesis of early/late bridged transition metal complexes. Synthetic routes to the bifunctional ligands were also developed. First, mononuclear complexes, such as [TpZr(OCH 2 PPh 2 ) 3 ] (Tp = trispyrazolylborato), [Cp 2 Zr(1-O-2-PHR-C 6 H 10 )(Me)] (R = 2,4,6-Pr i 3 C 6 H 2 (Tipp)), [Cp 2 Zr(SCH 2 CH 2 PHR) 2 ] (R = Ph, Mes, Tipp), and phosphinoferrocene derivatives, were prepared. These complexes are suitable precursors for the introduction of a second metal (as in, for example, [TpZr( w -OCH 2 PPh 2 ) 3 Mo(CO) 3 ]).